@inproceedings{MMMWPRGPR042005,
               author = {M. Bensch, M. Schröder, M. Bogdan, W. Rosenstiel, P. Czerner, R. Montino, G. Soberger, P. Linke, R. Schmidt},
               title = {Neural network algorithms for generalised online tool control in medium size semiconductor fabs},
               booktitle = {European Advanced Equipment Control/Advanced Process Control (AEC/APC) Konferenz},
               year = {2005},
               month = {04},
}